APPARATUS FOR ION-BEAM TREATMENT OF INNER SURFACES OF MILLIMETRE RANGE WAVEGUIDES

摘要

FIELD: physics. ^ SUBSTANCE: invention relates to techniques for ion-beam treatment of articles. The apparatus for ion-beam treatment of inner surfaces of millimetre range waveguides has a source of ions of the implanted metal which is sealed to the face of the processed object inside of which there is a probe which, through crossed electric fields formed by guide focusing and decelerating electrodes connected with corresponding units for focusing control voltage and the positive terminal of the power supply, directs cations of the implanted metal to the treated surfaces of the object. The probe is moved along the object by a controlled electric drive for step-by-step displacement. The number of implanted cations is controlled by measuring in the unit the equivalent charge of cations adhered to the treated surface and is compared in the unit with the number given by the electronic treatment program of the unit. ^ EFFECT: ion-beam treatment of inner surfaces of millimetre range waveguides and monitoring quality of the treated surfaces. ^ 2 dwg