| 摘要 |
The present invention relates to a shape measuring device that can improve measurement accuracy. A liquid crystal element 35 projects striped projection patterns whose intensities are changed according to the position in three sinusoidal states with initial phases of 0, 120, and 240 degrees onto an object 2 to be measured, each of a CCD sensor 44 and a CCD sensor 50 picks up an image obtained by forming reflection light from the object 2 to be measured by the projected projection pattern, and a controller 23 evaluates reliability of a measurement result at a position where a position conjugated with an image pickup surface of image pickup means is different along an optical path direction on the basis of each received light amount of each pixel of a plurality of images picked up when at least two projection patterns are projected. As a result, measurement accuracy can be improved. The present invention can be applied to a shape measuring device that measures the shape of an object to be measured. |
