发明名称 COMPOSITION FOR FORMING LOW DIELECTRIC FILM COMPRISING POROUS NANOPARTICLES AND METHOD FOR PREPARING LOW DIELECTRIC THIN FILM USING THE SAME
摘要 A composition for forming a low dielectric thin film, which includes a silane polymer, porous nanoparticles and an organic solvent, and a method of preparing a low dielectric thin film using the same. The low dielectric thin film prepared using the composition of the current invention may exhibit a low dielectric constant and excellent mechanical strength, and thus may be applied to conductive materials, display materials, chemical sensors, biocatalysts, insulators, packaging materials, etc.
申请公布号 KR101202955(B1) 申请公布日期 2012.11.19
申请号 KR20040118124 申请日期 2004.12.31
申请人 发明人
分类号 H01B3/46 主分类号 H01B3/46
代理机构 代理人
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