| 摘要 |
<p>PURPOSE: A robot system is provided to efficiently extract a wafer from a cassette storing the wafer. CONSTITUTION: A robot hand(12) returns a plate contained in a containing portion. A position detecting unit(22a) detects a containing position of the plate. A clearance calculation unit(22b) calculates a clearance between plates based on the detected containing position. An entry availability determining unit(22d) determines whether the robot hand cab be inserted into the clearance between the plates or not based on the calculated clearance. [Reference numerals] (10) Robot; (11) Arm; (12) Hand; (13) Sensor; (20) Controller; (21) Servo panel; (22) Control unit; (22a) Position detecting unit; (22b) Clearance calculation unit; (22c) Status determination unit; (22d) Entry availability determination unit; (22e) Position correction unit; (22f) Reference position calculating unit; (23) Memory unit; (23a) Critical value information; (23b) Reference position</p> |
