GROUP 2 METAL PRECURSORS FOR DEPOSITION OF GROUP 2 METAL OXIDE FILMS,申请号KR20090106880-传众专利搜索

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发明名称	GROUP 2 METAL PRECURSORS FOR DEPOSITION OF GROUP 2 METAL OXIDE FILMS
摘要
申请公布号	KR101202313(B1)	申请公布日期	2012.11.16
申请号	KR20090106880	申请日期	2009.11.06
申请人		发明人
分类号	C07F3/00;C23C18/00;H01L21/205	主分类号	C07F3/00
代理机构		代理人
主权项
地址

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