| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid processing device capable of simultaneously raising two cups by a simple method. <P>SOLUTION: In a liquid processing device 1, first and second cups 51, 52 provided to surround a rotation holding part 21 of a processed substrate guide processing liquid dispersed from a rotating processed substrate W downward, and a first drive part 610 and a second drive part 620 move the first cup 51 and the second cup 52 upward and downward between a position for receiving the processing liquid and its lower position. A control part 7 makes an elevation speed of the first cup 51 higher than that of the second cup 52 while the first and second cups 51, 52 are simultaneously raised. The first cup 51 or its first elevation member is overlaid on the second cup 52 or its second elevation member from a lower side, to transmit a driving force of the first drive part. Thereby, the first cup 51 and the second cup 52 are raised simultaneously. <P>COPYRIGHT: (C)2013,JPO&INPIT |
