CHARGED PARTICLE BEAM SYSTEMS, PARTICULARLY MASS FILTER FOR ION BEAM SYSTEM AND WIDE APERTURE WIEN E×B MASS FILTER

摘要

PROBLEM TO BE SOLVED: To provide a wide aperture Wien E×B mass filter for use in a focused ion beam system.

SOLUTION: An E×B Wien mass filter provides an independently-adjustable electric field combined with an electric dipole field required for mass separation. The independently adjustable electric field can provide a larger optical aperture, and be used to correct astigmatism and to deflect the beam in a direction parallel and/or perpendicular to a magnetic field.

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