| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photomask 1 that inclinedly emits parallel light 7 applied from an exposure device, to an irradiated body 6 and that can perform, by a single exposure, multi-angle inclined exposure to a subject 6 by a regular contact exposure device without inclining the irradiated body 6. <P>SOLUTION: The photomask includes: a pattern of a light transmission part 31 formed on an irradiation surface side of a transparent substrate; inclined planes 21 and 22 formed on a part in an emission surface side of the transparent substrate corresponding to the pattern; and further a gray scale film formed on the light transmission part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
