发明名称 DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
摘要 Exemplary embodiments of the present invention provide a display substrate including a gate electrode, an oxide semiconductor pattern, a source electrode, a drain electrode, and an etch stop pattern. The gate electrode may be disposed on a base substrate. The oxide semiconductor pattern may be disposed over the gate electrode. The source electrode may be disposed on the oxide semiconductor pattern. The drain electrode may be disposed on the oxide semiconductor pattern and spaced apart from the source electrode. The etch stop pattern may be disposed over the gate electrode, the etch stop pattern may be overlapping a space between the source electrode and the drain electrode and may include a metal oxide. The reliability of the display substrate may, therefore, be improved.
申请公布号 US2012286259(A1) 申请公布日期 2012.11.15
申请号 US201213431448 申请日期 2012.03.27
申请人 PARK JAE-WOO;LEE DONG-HOON;CHO SUNG-HAENG;LEE WOO-GEUN;YOON KAP-SOO;SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK JAE-WOO;LEE DONG-HOON;CHO SUNG-HAENG;LEE WOO-GEUN;YOON KAP-SOO
分类号 H01L29/786;H01L21/44 主分类号 H01L29/786
代理机构 代理人
主权项
地址