发明名称 CARBON FIELD EFFECT TRANSISTORS HAVING CHARGED MONOLAYERS TO REDUCE PARASITIC RESISTANCE
摘要 Carbon transistor devices having channels formed from carbon nanostructures, such as carbon nanotubes or graphene, and having charged monolayers to reduce parasitic resistance in un-gated regions of the channels, and methods for fabricating carbon transistor devices having charged monolayers to reduce parasitic resistance. For example, a carbon field effect transistor includes a channel comprising a carbon nanostructure formed on an insulating layer, a gate structure formed on the channel, a monolayer of DNA conformally covering the gate structure and a portion of the channel adjacent the gate structure, an insulating spacer conformally formed on the monolayer of DNA, and source and drain contacts connected by the channel
申请公布号 US2012286244(A1) 申请公布日期 2012.11.15
申请号 US201113104591 申请日期 2011.05.10
申请人 CHIU HSIN-YING;HAN SHU-JEN;MAUNE HAREEM TARIQ;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHIU HSIN-YING;HAN SHU-JEN;MAUNE HAREEM TARIQ
分类号 H01L51/30;H01L51/40 主分类号 H01L51/30
代理机构 代理人
主权项
地址