| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor that has a diaphragm structure detecting a change in pressure to be measured and allows reduction in number of components of an electromagnetic shield structure to improve productivity. <P>SOLUTION: A pressure sensor 1 includes a sensor chip 10 isolating a reference vacuum chamber 10B and a pressure introducing part 10A from each other within a package 10; a plurality of lead pins 41 each having one end connected to the sensor chip 10 and the other end exposed through an insertion hole 13a to the outside of the package 10 and connected to a core wire 91 of a cable 90; and an electromagnetic shield part 70 electromagnetically shielding a connection between each lead pin 41 and the cable 90. The electromagnetic shield part 70 is a single casing having a plate-shaped part 71a provided with a plurality of introduction holes 71b through which the plurality of lead pins 41 are introduced; and a housing part 72 coupled to the plate-shaped part 71a to surround the connection between each lead pin 41 and the cable 90. <P>COPYRIGHT: (C)2013,JPO&INPIT |
