| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an imprinting mold capable of easily and inexpensively smoothing the surface of the protruded part of a multi-layer structure (multi-stage shape). <P>SOLUTION: The method for manufacturing the imprinting mold includes a process for forming a first resin layer 3 having a first recessed part in a substrate 1, a process for forming a second resin layer 4 so as to embed the first recessed part on the first resin layer 3, a process for forming second recessed parts 4a-4e by selectively removing a part on the first resin layer 3 of the second resin layer 4 and forming the third recessed parts 4f-4h communicating with the second recessed parts 4a, 4d and 4e by selectively removing at least a part of the second resin layer 4 embedding the first recessed part so as not to expose the surface of the substrate 1, a process for filling the second recessed parts 4a-4e and the third recessed parts 4f-4h with a metal material and a process for removing the first resin layer 3, the second resin layer 4 and the substrate 1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
