| 摘要 |
<P>PROBLEM TO BE SOLVED: To pick up an image with high picture quality of even an area where a sufficient signal amount is not easily obtained from a sample, such as a low-layer area of a multilayer and a hole bottom of a hole pattern. <P>SOLUTION: There is provided an image pickup method for sample which uses a charged-particle microscope device, the image pickup method including: a first image acquisition step of acquiring a first image by setting a gain of a detector of the charged-particle microscope device to a first gain value and scanning the sample with a charged-particle beam; a second image acquisition step of acquiring a second image by setting the gain of the detector to a second gain value different from the first gain value and scanning the sample with the charged-particle beam; and an image composition step of putting the first image and the second image together using the first gain value and second gain value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
