SURFACE SHAPE MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To simply a surface shape measuring instrument by eliminating as many wiring systems of the instrument as possible.

SOLUTION: A surface shape measuring instrument 10 includes: a light source 14 for irradiating a surface of a measuring object 12 with light; a beam splitter 18 for dividing reflected light from a reflection point P1 on the surface of the measuring object 12 into first reflected light and second reflected light; a first mirror 20 for reflecting the first reflected light; and a second mirror 22 for reflecting the second reflected light. The surface shape measuring instrument 10 further includes an imaging device 24 provided with an imaging surface 30 for receiving the first reflected light reflected from the first mirror 20 and the second reflected light reflected from the second mirror 22. The imaging device 24 is arranged in such a manner that optical path length reaching the imaging surface 30 from the beam splitter 18 via the first mirror 20 is different from optical path length reaching the imaging surface 30 from the beam splitter 18 via the second mirror 22.

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