| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an antistatic agent applicator which suppresses the occurrence of variation in concentration of a replenished antistatic agent, and reliably and efficiently replenishes the antistatic agent. <P>SOLUTION: The antistatic agent applicator includes a replenishing means 30 replenishing the antistatic agent to a storage means 26 for supply. The replenishing means 30 includes: a storage means 44 for replenishing, which stores the antistatic agent for replenishing; a communication flow path 42 communicating the storage means 44 for replenishing with the storage means 26 for supply; a raw liquid supply means 54 supplying the raw liquid of the antistatic agent to the storage means 44 for replenishing; and a dilution liquid supply means 52 supplying a dilution liquid of the antistatic agent to the storage means 44 for replenishing. The raw liquid supplied by the raw liquid supply means 54 is mixed with the dilution liquid supplied by the dilution liquid supply means 52 to form the antistatic agent of a prescribed concentration, and the formed antistatic agent is replenished to the storage means 26 for supply. <P>COPYRIGHT: (C)2013,JPO&INPIT |
