A semiconductor structure comprises a frame (24) provided by a monocrystalline substrate comprising a first semiconductor material and having a window passing through the substrate between first and second opposite surfaces of the substrate; and a monocrystalline membrane (4) over the window provided by a layer supported directly on the first surface of the substrate, the membrane comprising a second, different semiconductor material which is under tensile strain.
申请公布号
WO2012153112(A2)
申请公布日期
2012.11.15
申请号
WO2012GB50980
申请日期
2012.05.04
申请人
THE UNIVERSITY OF WARWICK;SHAH, VISHAL AJIT;MYRONOV, MAKSYM