发明名称 Cold trap for adhering monomer and Apparatus for depositing monomer using the same
摘要 The present invention pertains to a monomer cooling trap, which is mounted on a path through which gas and monomers generated in the process of evaporation are discharged to the outside, and characterized by comprising: a case; a suction hole for sucking the gas and the monomers; a cooling plate received in the case and having a path formed inside so that refrigerant may flow therethrough, a surface to which the monomers are attached, and a through hole that is formed to penetrate upper and lower surfaces; and an exhaust hole for discharging gas from the inside of the case.
申请公布号 KR101201697(B1) 申请公布日期 2012.11.15
申请号 KR20100092538 申请日期 2010.09.20
申请人 发明人
分类号 B01D8/00;C23C14/12;H01L51/56 主分类号 B01D8/00
代理机构 代理人
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