| 摘要 |
<P>PROBLEM TO BE SOLVED: To bond two workpieces consisting of a resin workpiece and a resin workpiece or a resin workpiece and a glass substrate while ensuring bonding uniformity and preventing troubles such as an alignment shift and breakage. <P>SOLUTION: A first workpiece W1 is placed on an inverting stage 31 of an inverting stage unit 30, a second workpiece W2 is placed on the work stage 21 of a pressurizing stage unit 20, and is irradiated with UV light from a light irradiation unit 10. Then, the inverting stage 31 is inverted 180°, the workpieces W1, W2 are overlapped each other on the work stage 21, and the workpieces W1, W2 are pressurized and pre-bonded to each other. Then, the workpieces in the pre-bonded state are transferred to a heating stage by transfer means, the temperature of the workpieces is increased to a prescribed temperature by heating the workpieces by a heating mechanism, and the temperature is maintained until bonding is completed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
