摘要 |
<P>PROBLEM TO BE SOLVED: To improve sensitivity of a conversion element, for example. <P>SOLUTION: A radiation imaging apparatus comprises, on an insulating substrate 100, a pixel region in which pixels containing a conversion element 101 which converts radiation to electric charge and a switching element 102 connected to the conversion element 101 are arranged in a state of a matrix. The conversion element 101 comprises: an upper electrode layer 119; a lower electrode layer 115; and a semiconductor layer 117 arranged between the upper electrode layer 119 and the lower electrode layer 115. The upper electrode layer 119 comprises a gap 200 in a region in which at least the semiconductor layer 117 is arranged. <P>COPYRIGHT: (C)2013,JPO&INPIT |