| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a multilayer ceramic substrate free from an internal strain in manufacturing the multilayer ceramic substrate. <P>SOLUTION: A method for manufacturing a multilayer ceramic substrate by burning a laminate in which a plurality of ceramic green sheets are laminated comprises: a preliminary press step of forming a partial laminate which serves as a part of the laminate by laminating the ceramic green sheets and fixing the partial laminate by pressurizing it in a lamination direction; a main press step of laminating the partial laminate pressurized by the preliminary press step and the ceramic green sheets not pressurized by the preliminary press step and integrating the laminated partial laminate and the ceramic green sheets as a laminate by pressurizing them with a higher pressure than in the preliminary press step in the lamination direction; and a step of burning the laminate integrated by the main press step. <P>COPYRIGHT: (C)2013,JPO&INPIT |
