APPARATUS FOR SUPPLYING RAW MATERIALS

摘要

The present invention relates to an apparatus for supplying raw materials. The apparatus for supplying raw materials, which evaporates a raw material to supply the evaporated raw material onto a side of a substrate so as to deposit the raw material in a thin film form onto a surface of the substrate, is characterized in that it comprises: a raw material container for receiving, in either a solid or liquid state, the raw material to be deposited on the substrate; a first heater installed on said raw material container to supply heat to said raw material container, thereby evaporating the raw material received in said raw material container; a cooling part installed on said raw material container under said first heater so as to be connected to said first heater so as to cool the raw material received in said raw material container; a second heater installed on said raw material container above said first heater so as to supply heat to said raw material container, thereby preventing the evaporated raw material passing through said raw material container from being phase-shifted into a liquid or solid state; and a transfer unit, connected to said first heater or to said cooling part, for moving said first heater and said cooling part forward and backward along the lengthwise direction of said raw material container.