| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a training system of a semiconductor manufacturing apparatus, which efficiently performs training of a user for the semiconductor manufacturing apparatus. <P>SOLUTION: A device training server 1 is connected to a user terminal 3 through a line 5. In the device training server 1, program storage means stores a program for simulation of a semiconductor manufacturing device. Condition data reception means receives condition data on the simulation of the semiconductor manufacturing device, which is accepted from the user by the user terminal 3 and transmitted through the line 5. Program execution means executes the program stored in the program storage means on the basis of the received condition data. Result data transmission means transmits result data of the simulation performed by the executed program, to the user terminal 3 through the line 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
