| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a practical sensor rod for a position detector in which wear resistance and atmospheric isolation characteristics are increased without impairing positional detection sensitivity. <P>SOLUTION: There is provided a sensor rod in which a conductive layer is formed in a ring shape on a base material of a ferromagnetic material. The conductive layer is a conductive coating which has a particle laminated structure, whose Vickers hardness HV is 60 or more, specific electric resistance is 15 μΩcm or less, and film thickness is 0.1 mm or more. Furthermore, the surface of the base material including the conductive coating is coated with a hard coating which comprises at least one layer having higher hardness than the conductive layer, and the film thickness of the hard coating is adjusted to 0.3 mm or less. According to such a structure, the sensor rod for a position detector having small measurement error and high durability is obtained. <P>COPYRIGHT: (C)2013,JPO&INPIT |
