发明名称 Methods of Forming NAND Memory Constructions
摘要 Some embodiments include NAND memory constructions. The constructions may contain semiconductor material pillars extending upwardly between dielectric regions, with individual pillars having a pair of opposing vertically-extending sides along a cross-section. First conductivity type regions may be along first sides of the pillars, and second conductivity type regions may be along second sides of the individual pillars; with the second conductivity type regions contacting interconnect lines. Vertical NAND strings may be over the pillars, and select devices may selectively couple the NAND strings with the interconnect lines. The select devices may have vertical channels directly against the semiconductor material pillars and directly against upper regions of the first and second conductivity type regions. Some embodiments include methods of forming NAND memory constructions.
申请公布号 US2012289034(A1) 申请公布日期 2012.11.15
申请号 US201213556880 申请日期 2012.07.24
申请人 TANG SANH D.;MICRON TECHNOLOGY, INC. 发明人 TANG SANH D.
分类号 H01L21/20;H01L21/28 主分类号 H01L21/20
代理机构 代理人
主权项
地址