发明名称 CANTILEVER FOR MAGNETIC FORCE MICROSCOPE AND METHOD OF MANUFACTURING THE SAME
摘要 In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
申请公布号 US2012291161(A1) 申请公布日期 2012.11.15
申请号 US201213462845 申请日期 2012.05.03
申请人 发明人 ZHANG KAIFENG;HIROSE TAKENORI;WATANABE MASAHIRO;MATSUI TETSUYA;NAKAGOMI TSUNEO;TOKUTOMI TERUAKI
分类号 G01Q70/08;G01Q70/16 主分类号 G01Q70/08
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