SENSOR DEVICE WITH SEALING STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and related fabrication methods for a sensor device.

SOLUTION: The sensor device includes a sensor structure including a first portion having a sensing arrangement formed thereon and a second structure. A sealing structure is interposed between the sensor structure and the second structure, where the sealing structure surrounds the first portion of the sensor structure. The sealing structure establishes a fixed reference pressure on a first side of the first portion, and an opposing side of the first portion is exposed to an ambient pressure.

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