| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an air purging filtration system using a hollow fiber membrane filter, capable of efficiently reducing microbubbles when filtering high-purity chemicals using a filter to start up the filtration system at an early stage, and to provide an air purging method. <P>SOLUTION: The air purging filtration system filtering a liquid using a hollow fiber membrane filter is characterized by disposing a vacuum pump for depressurizing the hollow fiber membrane filter at the primary or secondary side of the membrane filter, and by efficiently reducing microbubbles generating at an early liquid-feeding stage. Besides, the air purging method for the hollow fiber membrane filter is characterized by feeding the liquid to the filter to filtrate after preliminarily depressurizing the filter using the vacuum pump when filtrating the liquid by the filter. <P>COPYRIGHT: (C)2013,JPO&INPIT |
