FINE PARTICLE SEPARATION APPARATUS AND FINE PARTICLE SEPARATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a fine particle separation apparatus and the like which enhance separation efficiency.

SOLUTION: The fine particle separation apparatus includes: a first flow channel having a first introduction port formed along a first virtual straight line and a connection port; a second flow channel having a second introduction port formed along a second virtual straight line intersecting with the first virtual straight line and a connection port having a first inner wall placed opposite to the connection port which is continuous with the connection port; a third flow channel which is continuous with the connection port; a filter part disposed on a second inner wall which is continuous with the first inner wall face of the inner wall faces composed of the third flow channel; and a fourth flow channel which is continuous with the third flow channel via the filter part.

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