发明名称 DUST REMOVING SYSTEM FOR CLEAN ROOM
摘要 <P>PROBLEM TO BE SOLVED: To provide a dust removing system for a clean room, allowing a person having entered the clean room to smoothly move. <P>SOLUTION: The dust removing system for the clean room includes a dust removing chamber 3 having: a changing room 7 leading to the clean room 1, pressurized and having an opening and closing door 5 at least to the outside; and a dust removing device 9. The dust removing device 9 includes: a jet dust removing section 10, which is provided on the changing room 7 side, and emits jet streams to the person entering the clean room 1 in a walking state from the side; and an air shower section 30 which communicates with the jet dust removing section 10, also communicates with the clean room 1, and causes air to flow downward from above in a layered state to the entering person in a walking state. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012225533(A) 申请公布日期 2012.11.15
申请号 JP20110091147 申请日期 2011.04.15
申请人 TOKYO ELECTRON LTD;TAISEI CORP;FUJI ELECTRIC CO LTD 发明人 MATSUO TAKENOBU;NARITA MASAHIRO;SUZUKI SHINGO;ITO HIROSHI;IKEDA YASUSHI;MATSUOKA KAZUO
分类号 F24F7/06 主分类号 F24F7/06
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