| 摘要 |
The present invention provides an intuitive and easy-to-operate graphical user interface environment for charged-particle microscopes. By restricting the operation items of charged-particle microscopes to the control button operations on GUI screen, excluding the charged-particle microscope specific technical terms, and unifying the observation conditions in the simple terminology with which the observation object can be intuitively understood, the operation environment which is intuitive and easy to understand for users not caring charged-particle microscopes is realized, and by restricting each of electron optical conditions in conjunction with the change of the observation condition to the fixed values and tabling them, it is possible to omit the operation workload of the user. |
