| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive x-ray diffraction apparatus capable of quickly and accurately detecting a shape of a diffraction ring. <P>SOLUTION: The x-ray diffraction apparatus includes: an x-ray emitter 13 for applying an x-ray to a measuring object OB; a table 27 for receiving the x-ray diffracted by the measuring object OB and fixing an imaging plate 28 for recording a diffraction ring; and a laser detection device PUH for applying a laser beam to the imaging plate 28 and reading out a shape of the diffraction ring. A through hole for passing the x-ray is formed on the center of the table 27. In a state that the table 27 is rotated by a spindle motor 24 and a feed motor 18 after imaging the diffraction ring and the table 27 is moved in parallel with a light receiving surface of the imaging plate 28, the laser detection device PUH applies the laser beam to the imaging plate 28 and acquires a laser irradiation position when the intensity of light emitted from the imaging plate 28 becomes maximum. <P>COPYRIGHT: (C)2013,JPO&INPIT |
