| 摘要 |
In one example, the memory device disclosed herein includes a gate insulation layer and a charge storage layer positioned above the gate insulation layer, wherein the charge storage layer has a first width. The device further includes a blocking insulation layer positioned above the charge storage layer and a gate electrode positioned above the blocking insulation layer, wherein the gate electrode has a second width that is greater than the first width. An illustrative method disclosed herein includes forming a gate stack for a memory device, wherein the gate stack includes a gate insulation layer, an initial charge storage layer, a blocking insulation layer and a gate electrode, and wherein the initial charge storage layer has a first width. The method further includes performing an etching process to selectively remove at least a portion of the initial charge storage layer so as to produce a charge storage layer having a second width that is less than the first width of the initial charge storage layer.
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