ELECTRON MICROSCOPE

摘要

The purpose of the present invention is, in a scanning electron microscope having a plurality of different types of detectors, to provide a means whereby an operator, under any observation conditions, can easily acquire the desired observation surface image. To accomplish this purpose, images are displayed in real time while observation conditions are consecutively changed, and the operator can easily acquire an image by selecting what he/she feels to be the optimum image from among the images displayed in real time. The observation conditions include the following: the working distance; the vacuum level; the add-subtract operations on detection signals from reflecting electron detecting elements that are divided into a plurality of elements; the voltage applied to the bias electrode of a low-vacuum secondary electron detector; and the mixing ratio of the signal when the mixing image is displayed.