| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide composition of a mixed/kneaded product and a method for drying, heating and straightening a molded body, capable of improving the accuracy of molding a water-based extrusion molded body and suppressing deformation and a dimensional change of a thick and long molded body during a drying step, in particular. <P>SOLUTION: A method for producing a SiC member for semiconductor production processes includes: a kneading step of kneading a kneading material which contains powder of SiC, a binder consisting mainly of water-soluble resin, and water to obtain the mixed/kneaded product; a molding step of subjecting the mixed/kneaded product to extrusion molding to obtain the molded body; and the drying step of uniforming the temperature of the whole of the obtained molded body in a high-humidity environment to obtain a dried SiC member. <P>COPYRIGHT: (C)2013,JPO&INPIT |
