| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromechanical conversion device which reduces parasitic capacitance and prevents the increase of noise, the reduction of band width, and the deterioration of sensitivity. <P>SOLUTION: An electromechanical conversion device includes: a cell 1 composed of a substrate 7, a vibration film 4, a vibration film support part 6 supporting the vibration film 4 so as to form a clearance 5 between the substrate 7 and the vibration film 4; and lead out wiring 12 of the cell 1 which is disposed on the substrate 7 through an insulator 11. In the electromechanical conversion device, the insulator 11 is thicker than the vibration film support part 6. <P>COPYRIGHT: (C)2013,JPO&INPIT |
