发明名称 DUST REMOVING DEVICE FOR CLEAN ROOM
摘要 <P>PROBLEM TO BE SOLVED: To provide a dust removing device for a clean room, which allows a person to smoothly enter a clean room without stopping for a long time, while preventing congestion. <P>SOLUTION: The dust removing device includes a jet dust removing section 10 emitting jet streams to a walking person from the side, and an air shower section 30 including blowers 32a-32d with filters, which communicate with the jet dust removing section 10 and cause air to flow downward from above in a layer state to the walking person. The air shower section 30 is arranged in communication with the entrance 2 of the clean room 1. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012225532(A) 申请公布日期 2012.11.15
申请号 JP20110091146 申请日期 2011.04.15
申请人 TOKYO ELECTRON LTD;TAISEI CORP;FUJI ELECTRIC CO LTD 发明人 MATSUO TAKENOBU;NARITA MASAHIRO;SUZUKI SHINGO;ITO HIROSHI;IKEDA YASUSHI;MATSUOKA KAZUO
分类号 F24F7/06 主分类号 F24F7/06
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