发明名称 |
METHODS OF DRY STRIPPING BORON-CARBON FILMS |
摘要 |
Embodiments of the invention generally relate to methods of dry stripping boron-carbon films. In one embodiment, alternating plasmas of hydrogen and oxygen are used to remove a boron-carbon film. In another embodiment, co-flowed oxygen and hydrogen plasma is used to remove a boron-carbon containing film. A nitrous oxide plasma may be used in addition to or as an alternative to either of the above oxygen plasmas. In another embodiment, a plasma generated from water vapor is used to remove a boron-carbon film. The boron-carbon removal processes may also include an optional polymer removal process prior to removal of the boron-carbon films. The polymer removal process includes exposing the boron-carbon film to NF3 to remove from the surface of the boron-carbon film any carbon-based polymers generated during a substrate etching process. |
申请公布号 |
US2012285492(A1) |
申请公布日期 |
2012.11.15 |
申请号 |
US201213456404 |
申请日期 |
2012.04.26 |
申请人 |
LEE KWANGDUK DOUGLAS;RATHI SUDHA;SANKARAKRISHNAN RAMPRAKASH;SEAMONS MARTIN JAY;JAMIL IRFAN;KIM BOK HOEN;APPLIED MATERIALS, INC. |
发明人 |
LEE KWANGDUK DOUGLAS;RATHI SUDHA;SANKARAKRISHNAN RAMPRAKASH;SEAMONS MARTIN JAY;JAMIL IRFAN;KIM BOK HOEN |
分类号 |
B08B5/00 |
主分类号 |
B08B5/00 |
代理机构 |
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