COMBINED SENSOR

摘要

A combined detection element (6) of the present invention includes an acceleration detection element (2) and an angular velocity detection element (4) stacked on the acceleration detection element (2) in such a manner as to avoid contacting with the weight parts (12) of the acceleration detection element (2). The angular velocity detection element (4) includes a recess (26) in a surface thereof facing the weight parts (12) of the acceleration detection element (2) so as to avoid contacting with the weight parts (12). At least part of the recess (26) has a depth not exceeding the vertical range of motion of weight parts (12), thereby suppressing the upward movement of weight parts (12).