Device and method for releasing a product substrate from a holder substrate

摘要

The solvent container has flexible film (3) that is connected with film frame (1), which has an adhesive layer for receiving product substrate (4) in a contacting surface portion of film. The film is connected with the film frame in contacting surface portion for fixing an attachment portion of film. A tub-type solvent container is formed by the film and the film frame for holding a fluid solvent or agent for loosening a connection layer (6), so that the product substrates and connection layer are held in the container. An independent claim is included for method of dissolving compound layer between product substrate and carrier substrate.