| 摘要 |
<p>THE INVENTION RELATES TO A METHOD FOR TREATING OR COATING SURFACES BY MEANS OF A PLASMA. A CARRIER GAS IS THUS INTRODUCED INTO AT LEAST ONE PHYSICALLY SEPARATE REACTION CHAMBER AND MIXED WITH THE GENERATED PLASMA BEAM SUCH THAT THE CARRIER GAS IS ACTIVATED OR A PARTICLE BEAM IS GENERATED WHICH IMPINGES THE SURFACE OF A WORKPIECE FOR TREATMENT OR COATING INDEPENDENTLY OF THE PLASMA STREAM.</p> |
