| 摘要 |
PURPOSE: A tridentate beta-diketiminate compound is provided to be used as a useful precursor for manufacturing strontium or barium oxide thin film and nanomaterial, and strontium or barium-containing heterometal thin film and nanomaterial. CONSTITUTION: A tridentate beta-diketiminate compound is indicated in chemical formula 1. In chemical formula 1, R^1 and R^2 is independently C1-10 linear or branched alkyl group or fluoroalkyl group, R^3 is C1-10 linear or branched alkyl group, R^4 is a linear or branched alkylene group, A is a linear or branched C1-10 alkylamine group or alkoxy group. A manufacturing method of the tridentate beta-diketiminate compound comprises a step of reacting a compound indicated in chemical formula 8 or 9 and an amine compound indicated in chemical formula 10.
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