发明名称 Method and solution for growing a charge-transfer complex salt onto a metal surface
摘要 <p>This invention provides a solution for growing a charge-transfer complex salt M + A - onto the surface of a metal M, comprising: (a) an organic solvent comprising one nitrile function, (b) an electron acceptor molecule A; (c) a co-solvent wherein said at least one electron acceptor molecule A is more soluble than said charge-transfer complex salt M + A - , and (d) a salt additive selected from the group consisting of M + Y - and E + A - wherein Y - and E + are non-reactive counter-ions, A - is the anion corresponding to said acceptor molecule A and M + is the cation corresponding to the metal M. This invention also provides a CMOS wafer comprising a metal layer M, an insulator layer (4) above said metal layer M and via holes (1) extending through said insulator layer (4) and through a portion Hc of said metal layer M, said via holes being at least partially filled with a complex charge transfer salt M + A - layer of thickness H MA , wherein A - is the anion corresponding to an acceptor molecule A, and wherein said portion H C has a depth of 10 to 50 nm.</p>
申请公布号 EP1882693(B1) 申请公布日期 2012.11.14
申请号 EP20070014479 申请日期 2007.07.24
申请人 IMEC 发明人 MULLER, ROBERT;GENOE, JAN
分类号 H01B1/12 主分类号 H01B1/12
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