发明名称 A component pane handler configured to handle component panes of multiple sizes
摘要 A component pane handling apparatus configured to handle, carry, capture, hold, retrieve, and/or transfer e.g. wafers or film frames or solar cell panels ("components panes") of multiple different sizes. The component pane handling apparatus includes at least one component pane capture element that can be displaced between a number of different positions, each position corresponding to a particular component pane size. Therefore, the at least one component pane capture element can be positioned to different positions for allowing handling, carrying, capturing, holding, retrieving, and/or transferring of component panes of corresponding sizes. The component pane handling apparatus also includes a position alignment mechanism configured to control and/or effectuate displacement of the at least one component pane capture element to the different positions. The component pane handling apparatus can also include at least one displacement arm coupled to the at least one component pane capture element. The displacement of the at least one component pane capture element can be effectuated by a displacement, rotation, and/or translation of at least a portion of the at least one displacement arm. A method for handling component panes (e.g., wafers or film frames or solar cell panels) of multiple sizes is also included in this disclosure.
申请公布号 EP2523212(A2) 申请公布日期 2012.11.14
申请号 EP20120167908 申请日期 2012.05.14
申请人 SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS PTE LTD. 发明人 JIN, JIAN PING;HENG, LEE KWANG
分类号 H01L21/687 主分类号 H01L21/687
代理机构 代理人
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