发明名称 Mask frame assembly for thin film deposition and the manufacturing method thereof
摘要 <p>PURPOSE: A mask frame assembly for thin film deposition and a manufacturing method thereof are provided to prevent the drooping of a split mask by support bars, thereby improving adhesion between a substrate and the split mask. CONSTITUTION: A mask frame assembly(100) comprises a frame(120) with an opening(121), support bars(130) installed across the opening in the frame, and a plurality of split masks(110) installed across the opening in the frame, crossing the support bars. Both ends of a split mask are fixed to the frame, and the crossing points of the support bars and the split masks are fixed to the support bars. A partial cut part is formed by cutting a part of a split mask around the spot of a split mask fixed to the support bars.</p>
申请公布号 KR20120125035(A) 申请公布日期 2012.11.14
申请号 KR20110043073 申请日期 2011.05.06
申请人 发明人
分类号 C23C14/04;H01L51/56 主分类号 C23C14/04
代理机构 代理人
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