发明名称 |
Megasonic processing apparatus with frequency sweeping of thickness mode transducers |
摘要 |
A megasonic processing apparatus and method has one or more piezoelectric transducers operating in thickness mode at fundamental resonant frequencies of at least 300 KHz. A generator powers the transducers with a variable-frequency driving signal that varies or sweeps throughout a predetermined sweep frequency range. The generator repeatedly vanes or sweeps the frequency of the driving signal through a sweep frequency range that includes the resonant frequencies of all the transducers. |
申请公布号 |
US8310131(B2) |
申请公布日期 |
2012.11.13 |
申请号 |
US20090573064 |
申请日期 |
2009.10.02 |
申请人 |
GOODSON J. MICHAEL;MEGASONIC SWEEPING, INC. |
发明人 |
GOODSON J. MICHAEL |
分类号 |
H01L41/08 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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