发明名称 METHOD AND PROCESS FOR METALLIC STAMP REPLICATION FOR LARGE AREA NANOPATTERNS
摘要 A method and process for obtaining a metal stamp from an intermediate polymer stamp comprising the steps of providing a first print layer on top of a first polymer layer, imprinting structures to obtain an intermediate stamp. A conductive layer is provided on top of the structures to obtain a seed layer if the imprinted polymer is a non-conductive, plating metal on top of the intermediate polymer stamp to obtain a metal stamp then separating the intermediate stamp from the metal stamp. This invention demonstrates stamp replication in high throughput and at low cost.
申请公布号 KR20120124476(A) 申请公布日期 2012.11.13
申请号 KR20127023157 申请日期 2010.02.05
申请人 发明人
分类号 G03F7/00;H01L21/027 主分类号 G03F7/00
代理机构 代理人
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