EXHAUST RATE CONTROL METHOD BY ELECTRIC VACUUM VALVE, EXHAUST RATE CONTROL SYSTEM BY ELECTRIC VACUUM VALVE, METHOD FOR DETERMINING VALVE OPENING DEGREE SETTING POINT OF ELECTRIC VACUUM VALVE USED FOR EXHAUST RATE CONTROL, AND RECORDING MEDIUM,申请号KR20100132966-传众专利搜索

发明名称	EXHAUST RATE CONTROL METHOD BY ELECTRIC VACUUM VALVE, EXHAUST RATE CONTROL SYSTEM BY ELECTRIC VACUUM VALVE, METHOD FOR DETERMINING VALVE OPENING DEGREE SETTING POINT OF ELECTRIC VACUUM VALVE USED FOR EXHAUST RATE CONTROL, AND RECORDING MEDIUM
摘要
申请公布号	KR101199945(B1)	申请公布日期	2012.11.13
申请号	KR20100132966	申请日期	2010.12.23
申请人		发明人
分类号	F16K51/02;H01L21/02	主分类号	F16K51/02
代理机构		代理人
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