发明名称 Nanowire FET having induced radial strain
摘要 A device is provided and includes a nanowire connecting first and second silicon-on-insulator (SOI) pads and a gate including a gate conductor surrounding the nanowire and a fully silicided material surrounding the gate conductor to radially strain the nanowire.
申请公布号 US8309991(B2) 申请公布日期 2012.11.13
申请号 US20090631218 申请日期 2009.12.04
申请人 BANGSARUNTIP SARUNYA;COHEN GUY;MURRAY CONAL E.;SLEIGHT JEFFREY W.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BANGSARUNTIP SARUNYA;COHEN GUY;MURRAY CONAL E.;SLEIGHT JEFFREY W.
分类号 H01L29/76;H01L21/336 主分类号 H01L29/76
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