发明名称 Group III nitride semiconductor light-emitting device and production method therefor
摘要 A method for producing a light-emitting device including a growth substrate made of Group III nitride semiconductor, and a Group III nitride semiconductor layer stacked on the top surface of the growth substrate, includes forming, between the growth substrate and the semiconductor layer, a stopper layer exhibiting resistance to a wet etchant, and wet-etching the bottom surface of the growth substrate until the stopper layer is exposed.
申请公布号 US8309381(B2) 申请公布日期 2012.11.13
申请号 US20090585994 申请日期 2009.09.30
申请人 MORIYAMA MIKI;GOSHONOO KOICHI;TOYODA GOSEI CO., LTD. 发明人 MORIYAMA MIKI;GOSHONOO KOICHI
分类号 H01L33/00;H01L21/306 主分类号 H01L33/00
代理机构 代理人
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