| 摘要 |
PURPOSE: An automatic cleaning apparatus and a driving method thereof are provided to effectively prevent damage to a coating film by mechanically washing and inspecting a window used for a laser crystallization device at the same time. CONSTITUTION: A jig(Zig) fixes a window(Win). A cleaning nozzle(130) sprays washing solution to one or more surfaces of the window. A brush(140) physically washes one or more surfaces of the window. A DIW(Deionized Water) nozzle(150) sprays deionized water to one or more surfaces of the window. An inspector(180) inspects cleanliness for the window. A first dry nozzle and a second dry nozzle dry one or more surfaces of the window with different methods. A transfer unit transfers the jig from the location in which the cleaning nozzle is installed to the location in which the inspector is installed.
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